Inventor
PARK JONG-RAK
KR8 patents
⚠️ This page may combine multiple inventors who share the name “PARK JONG-RAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS7001697B2Feb 21, 2006
Photomask having a transparency-adjusting layer, method of manufacturing the photomask, and exposure method using the photomask
SAMSUNG ELECTRONICS CO LTD41 citations91
US6911286B2Jun 28, 2005
Method of designing phase grating pattern providing modified illumination optimum for producing a target pattern and method of manufacturing a photo mask system comprising the phase grating pattern
SAMSUNG ELECTRONICS CO LTD7 citations71
US6933083B2Aug 23, 2005
Method of designing phase grating pattern for use in modifying illumination in an exposure process, and method of manufacturing a photo mask system having the phase grating pattern
SAMSUNG ELECTRONICS CO LTD0 citations39