Inventor
KAWANO MICHIARI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KAWANO MICHIARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS7129565B2Oct 31, 2006
Semiconductor device, method of manufacturing the same, and phase shift mask
FUJITSU LTD35 citations95
US7119439B2Oct 10, 2006
Semiconductor device and method for manufacturing the same
FUJITSU LTD26 citations92
US6433381B2Aug 13, 2002
Semiconductor device and method of manufacturing the same
FUJITSU LTD39 citations92
US4833519AMay 23, 1989
Semiconductor device with a wiring layer having good step coverage for contact holes
FUJITSU LTD49 citations88
US7241676B2Jul 10, 2007
Semiconductor device and method for manufacturing the same
FUJITSU LTD15 citations83
US5661340AAug 26, 1997
Dynamic random access memory having a stacked fin capacitor with reduced fin thickness
FUJITSU LTD18 citations83
US6794244B2Sep 21, 2004
Semiconductor device and method of manufacturing the same
FUJITSU LTD4 citations62