Inventor
NOMOTO MINEO
JP31 patents
⚠️ This page may combine multiple inventors who share the name “NOMOTO MINEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
23 patentsUS4391511AJul 5, 1983
Light exposure device and method
HITACHI LTD153 citations99
US6943086B2Sep 13, 2005
Laser annealing apparatus, TFT device and annealing method of the same
HITACHI LTD82 citations98
US7119908B2Oct 10, 2006
Method and apparatus for measuring thickness of thin film and device manufacturing method using same
HITACHI LTD62 citations96
US4628531ADec 9, 1986
Pattern checking apparatus
HITACHI LTD100 citations95
US5973777AOct 26, 1999
Method and apparatus for inspecting defects of surface shape
HITACHI LTD21 citations93
US7020306B2Mar 28, 2006
Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device
HITACHI LTD35 citations92
US5645351AJul 8, 1997
Temperature measuring method using thermal expansion and an apparatus for carrying out the same
HITACHI LTD34 citations92
US5015097AMay 14, 1991
Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method
HITACHI LTD28 citations92
US4872187AOct 3, 1989
X-ray tomographic imaging system and method
HITACHI LTD33 citations92
US4776023AOct 4, 1988
Pattern inspection method
HITACHI LTD53 citations92
US4744047AMay 10, 1988
Pattern test apparatus including a plurality of pattern generators
HITACHI LTD49 citations92
US6950545B1Sep 27, 2005
Nondestructive inspection method and apparatus
HITACHI LTD30 citations91
US6072899AJun 6, 2000
Method and device of inspecting three-dimensional shape defect
HITACHI LTD32 citations90
US5301248AApr 5, 1994
Method for pattern inspection and apparatus therefor
HITACHI LTD40 citations89
US7326623B2Feb 5, 2008
Method of manufacturing display device
HITACHI LTD11 citations84
US7057744B2Jun 6, 2006
Method and apparatus for measuring thickness of thin film and device manufacturing method using same
HITACHI LTD13 citations84
US7272253B2Sep 18, 2007
Method for non-destructive inspection, apparatus thereof and digital camera system
HITACHI LTD15 citations82
US4420233ADec 13, 1983
Projecting apparatus
HITACHI LTD26 citations81
US7612889B2Nov 3, 2009
Method and apparatus for measuring displacement of a sample
HITACHI LTD6 citations74
US6987874B2Jan 17, 2006
Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same
HITACHI LTD10 citations74
US6897079B2May 24, 2005
Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same
HITACHI LTD11 citations74
US7215807B2May 8, 2007
Nondestructive inspection method and apparatus
HITACHI LTD7 citations72
US6794206B2Sep 21, 2004
Method of polishing a film
HITACHI LTD5 citations63
NAKATA TOSHIHIKO
4 patentsUS8629985B2Jan 14, 2014
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
NAKATA TOSHIHIKO3 citations62
US8284406B2Oct 9, 2012
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
NAKATA TOSHIHIKO3 citations62
US8659761B2Feb 25, 2014
Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light
NAKATA TOSHIHIKO0 citations52
US8064066B2Nov 22, 2011
Method and apparatus for measuring displacement of a sample to be inspected using an interference light
NAKATA TOSHIHIKO0 citations52