Inventor

YUASA TAMAKI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “YUASA TAMAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

USD563950SMar 11, 2008

Microwave introducing antenna for a plasma processing apparatus

TOKYO ELECTRON LTD3 citations61

US8052887B2Nov 8, 2011

Substrate processing apparatus

TOKYO ELECTRON LTD2 citations60

NOZAWA TOSHIHISA

2 patents

US8173928B2May 8, 2012

Processing device

NOZAWA TOSHIHISA2 citations60

US8785809B2Jul 22, 2014

Processing device

NOZAWA TOSHIHISA0 citations49

NISHIMOTO SHINYA

1 patent

US8485127B2Jul 16, 2013

Processing apparatus

NISHIMOTO SHINYA8 citations81

ISHIBASHI KIYOTAKA

1 patent

US8267040B2Sep 18, 2012

Plasma processing apparatus and plasma processing method

ISHIBASHI KIYOTAKA0 citations37