Inventor
YEN CHIH-PEN
TW3 patents
Patents
3 patentsUS6815653B2Nov 9, 2004
Method and apparatus for early detection of material accretion and peeling in plasma system
TAIWAN SEMICONDUCTOR MFG25 citations85
US7354555B2Apr 8, 2008
Gas flow control system with interlock
TAIWAN SEMICONDUCTOR MFG2 citations58
US6708565B2Mar 23, 2004
Ultrasonic wafer blade vibration detecting
TAIWAN SEMICONDUCTOR MFG6 citations52