P

Inventor

TSAY JENG-YANN

TW7 patents
⚠️ This page may combine multiple inventors who share the name “TSAY JENG-YANN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

4 patents
US11226564B2Jan 18, 2022

EUV light source and apparatus for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11158989B2Oct 26, 2021

Laser source device, extreme ultraviolet lithography device and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10624196B1Apr 14, 2020

Laser source device and extreme ultraviolet lithography device

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US9970105B2May 15, 2018

Method for sealing processing module

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36

TAIWAN SEMICONDUCTOR MFG

2 patents
US7354555B2Apr 8, 2008

Gas flow control system with interlock

TAIWAN SEMICONDUCTOR MFG2 citations58
US6708565B2Mar 23, 2004

Ultrasonic wafer blade vibration detecting

TAIWAN SEMICONDUCTOR MFG6 citations52

HSU YEN-HSIANG

1 patent
US8149562B2Apr 3, 2012

System for decharging a wafer or substrate after dechucking from an electrostatic chuck

HSU YEN-HSIANG2 citations51