Inventor
CHUANG JENG-CHIANG
TW4 patents
Patents
4 patentsUS6815653B2Nov 9, 2004
Method and apparatus for early detection of material accretion and peeling in plasma system
TAIWAN SEMICONDUCTOR MFG25 citations85
US7354555B2Apr 8, 2008
Gas flow control system with interlock
TAIWAN SEMICONDUCTOR MFG2 citations58
US6733621B2May 11, 2004
Venting apparatus and method for vacuum system
TAIWAN SEMICONDUCTOR MFG2 citations57
US7381293B2Jun 3, 2008
Convex insert ring for etch chamber
TAIWAN SEMICONDUCTOR MFG2 citations52