Inventor
HSU YUNG-MAO
TW4 patents
Patents
4 patentsUS5851343ADec 22, 1998
Protective shield around the inner edge of endpoint window in a plasma etching chamber
TAIWAN SEMICONDUCTOR MFG42 citations87
US6815653B2Nov 9, 2004
Method and apparatus for early detection of material accretion and peeling in plasma system
TAIWAN SEMICONDUCTOR MFG25 citations85
US5697839ADec 16, 1997
Ventilation hood for wet-clean process chamber
TAIWAN SEMICONDUCTOR MFG10 citations65
US7354555B2Apr 8, 2008
Gas flow control system with interlock
TAIWAN SEMICONDUCTOR MFG2 citations58