Inventor
TOYOKAWA FUMITOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TOYOKAWA FUMITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
3 patentsUS4992301AFeb 12, 1991
Chemical vapor deposition apparatus for obtaining high quality epitaxial layer with uniform film thickness
NEC CORP52 citations91
US4782029ANov 1, 1988
Method of gettering semiconductor wafers with an excimer laser beam
NEC CORP55 citations91
US5449532ASep 12, 1995
Method of manufacturing silicon substrate
NEC CORP20 citations89