Inventor
TAMARU TSUYOSHI
JP56 patents
⚠️ This page may combine multiple inventors who share the name “TAMARU TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
23 patentsUS6028360AFeb 22, 2000
Semiconductor integrated circuit device in which a conductive film is formed over a trap film which in turn is formed over a titanium film
HITACHI LTD101 citations99
US6258649B1Jul 10, 2001
Semiconductor integrated circuit device and method of manufacturing the same
HITACHI LTD91 citations98
US6215144B1Apr 10, 2001
Semiconductor integrated circuit device, and method of manufacturing the same
HITACHI LTD73 citations96
US5780882AJul 14, 1998
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD33 citations96
US5498768AMar 12, 1996
Process for forming multilayer wiring
HITACHI LTD60 citations96
US5331191AJul 19, 1994
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD24 citations96
US5202275AApr 13, 1993
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD43 citations96
US6605530B2Aug 12, 2003
Method for fabricating semiconductor integrated circuit
HITACHI LTD14 citations92
US6399438B2Jun 4, 2002
Method of manufacturing semiconductor integrated circuit device having a capacitor
HITACHI LTD32 citations92
US6103566AAug 15, 2000
Method for manufacturing semiconductor integrated circuit device having a titanium electrode
HITACHI LTD22 citations92
US5670421ASep 23, 1997
Process for forming multilayer wiring
HITACHI LTD31 citations92
US6853081B2Feb 8, 2005
Method for fabricating semiconductor integrated circuit
HITACHI LTD11 citations82
US6548847B2Apr 15, 2003
Semiconductor integrated circuit device having a first wiring strip exposed through a connecting hole, a transition-metal film in the connecting hole and an aluminum wiring strip thereover, and a transition-metal nitride film between the aluminum wiring strip and the transition-metal film
HITACHI LTD12 citations82
US6342412B1Jan 29, 2002
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD8 citations82
US6169324B1Jan 2, 2001
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD13 citations82
US6127255AOct 3, 2000
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD8 citations82
US5811316ASep 22, 1998
Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring
HITACHI LTD8 citations82
US5739589AApr 14, 1998
Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same
HITACHI LTD13 citations82
US6638811B2Oct 28, 2003
Method of manufacturing a semiconductor integrated circuit device having a capacitor
HITACHI LTD9 citations74
US6492730B1Dec 10, 2002
Method for fabricating semiconductor integrated circuit
HITACHI LTD4 citations74
US5557147ASep 17, 1996
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same
HITACHI LTD7 citations74
US6686619B2Feb 3, 2004
Dynamic random access memory with improved contact arrangements
HITACHI LTD7 citations73
US7119443B2Oct 10, 2006
Semiconductor integrated circuit device having a conductive film which contains metal atoms bondable to a halogen element
HITACHI LTD2 citations63
RENESAS TECH CORP
11 patentsUS6908847B2Jun 21, 2005
Method of manufacturing a semiconductor device having an interconnect embedded in an insulating film
RENESAS TECH CORP46 citations96
US6818546B2Nov 16, 2004
Semiconductor integrated circuit device and a method of manufacturing the same
RENESAS TECH CORP50 citations96
US7323781B2Jan 29, 2008
Semiconductor device and manufacturing method thereof
RENESAS TECH CORP30 citations95
US6856019B2Feb 15, 2005
Semiconductor integrated circuit device
RENESAS TECH CORP14 citations92
US7642652B2Jan 5, 2010
Semiconductor integrated circuit device and a method of manufacturing the same
RENESAS TECH CORP9 citations84
US7321171B2Jan 22, 2008
Semiconductor integrated circuit device
RENESAS TECH CORP10 citations84
US7723849B2May 25, 2010
Semiconductor device and manufacturing method thereof
RENESAS TECH CORP9 citations83
US7176121B2Feb 13, 2007
Semiconductor device and manufacturing method thereof
RENESAS TECH CORP12 citations83
US7777343B2Aug 17, 2010
Semiconductor device and manufacturing method thereof
RENESAS TECH CORP2 citations63
US7282434B2Oct 16, 2007
Method of manufacturing a semiconductor device
RENESAS TECH CORP4 citations62
US6767782B2Jul 27, 2004
Manufacturing method of semiconductor device
RENESAS TECH CORP5 citations61
RENESAS ELECTRONICS CORP
10 patentsUS9659867B2May 23, 2017
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP2 citations84
US9064870B2Jun 23, 2015
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP7 citations84
US8012871B2Sep 6, 2011
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP7 citations83
US8617981B2Dec 31, 2013
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP4 citations74
US8053893B2Nov 8, 2011
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP6 citations73
US8810034B2Aug 19, 2014
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP1 citations63
US10304726B2May 28, 2019
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP0 citations52
US10121693B2Nov 6, 2018
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP0 citations52
US9818639B2Nov 14, 2017
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP0 citations52
US9490213B2Nov 8, 2016
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP0 citations52
TEXAS INSTRUMENTS INC
2 patents(unassigned)
1 patentRENESASTECHNOLOGY CORP
1 patentNOGUCHI JUNJI
1 patentHITACHI VLSI ENG
1 patentShowing the top 50 of 56 patents by PatentIndex Score.