Inventor

UCHIDA TAIJIRO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “UCHIDA TAIJIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC CORP

3 patents

US5762750AJun 9, 1998

Magnetic neutral line discharged plasma type surface cleaning apparatus

ULVAC CORP12 citations72

US5804027ASep 8, 1998

Apparatus for generating and utilizing magnetically neutral line discharge type plasma

ULVAC CORP9 citations70

US6475333B1Nov 5, 2002

Discharge plasma processing device

ULVAC CORP6 citations59

ULVAC INC

2 patents

US6885154B2Apr 26, 2005

Discharge plasma processing system

ULVAC INC15 citations75

US8048260B2Nov 1, 2011

Magnetic neutral line discharge plasma processing system

ULVAC INC2 citations59