Inventor
FUKUOKA TETSUO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “FUKUOKA TETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7797855B2Sep 21, 2010
Heating apparatus, and coating and developing apparatus
TOKYO ELECTRON LTD30 citations92
US6744020B2Jun 1, 2004
Heat processing apparatus
TOKYO ELECTRON LTD24 citations90
US7812285B2Oct 12, 2010
Apparatus and method for heating substrate and coating and developing system
TOKYO ELECTRON LTD7 citations73
US8025925B2Sep 27, 2011
Heating apparatus, coating and development apparatus, and heating method
TOKYO ELECTRON LTD5 citations63
US7977609B2Jul 12, 2011
Temperature measuring device using oscillating frequency signals
TOKYO ELECTRON LTD4 citations62
US7871265B2Jan 18, 2011
Heat treatment device
TOKYO ELECTRON LTD5 citations62
US10459339B2Oct 29, 2019
Resist pattern forming method, coating and developing apparatus and storage medium
TOKYO ELECTRON LTD1 citations61
US10340140B2Jul 2, 2019
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47
FUKUOKA TETSUO
4 patentsUS8933376B2Jan 13, 2015
Heating device, coating and developing system, heating method and storage medium
FUKUOKA TETSUO3 citations61
US8217313B2Jul 10, 2012
Heating apparatus and heating method
FUKUOKA TETSUO2 citations61
US8326559B2Dec 4, 2012
Substrate processing system, system inspecting method, system inspecting program and recording medium storing the program recorded therein
FUKUOKA TETSUO3 citations60
US8304020B2Nov 6, 2012
Adhesion promoting process, adhesion promoting device, coating and developing system and storage medium
FUKUOKA TETSUO0 citations40