P

Inventor

KOCHERSPERGER PETER C

US12 patents
⚠️ This page may combine multiple inventors who share the name “KOCHERSPERGER PETER C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

6 patents
US7411652B2Aug 12, 2008

Lithographic apparatus and device manufacturing method

ASML HOLDING NV13 citations84
US7549321B2Jun 23, 2009

Pressure sensor

ASML HOLDING NV13 citations82
US7472580B2Jan 6, 2009

Pressure sensor

ASML HOLDING NV16 citations82
US7164463B2Jan 16, 2007

Lithographic tool with dual isolation system and method for configuring the same

ASML HOLDING NV2 citations62
US7158213B2Jan 2, 2007

Lithographic tool with dual isolation system and method for configuring the same

ASML HOLDING NV2 citations62
US7999939B2Aug 16, 2011

Real time telecentricity measurement

ASML HOLDING NV0 citations40

SILICON VALLEY GROUP

1 patent
US6538720B2Mar 25, 2003

Lithographic tool with dual isolation system and method for configuring the same

SILICON VALLEY GROUP42 citations95

ZIMMERMAN RICHARD CARL

1 patent
US8629973B2Jan 14, 2014

Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation

ZIMMERMAN RICHARD CARL13 citations78

BLEEKER ARNO JAN

1 patent
US8159647B2Apr 17, 2012

Lithographic apparatus and device manufacturing method

BLEEKER ARNO JAN2 citations59

LANSBERGEN ROBERT GABRIËL MARIA

1 patent
US9457947B2Oct 4, 2016

Lithographic apparatus and device manufacturing method

LANSBERGEN ROBERT GABRIËL MARIA0 citations45

LANSBERGEN ROBERT GABRIEL MARIA

1 patent
US9669984B2Jun 6, 2017

Lithographic apparatus and device manufacturing method

LANSBERGEN ROBERT GABRIEL MARIA0 citations39

KOCHERSPERGER PETER C

1 patent
US9083227B2Jul 14, 2015

Linear motor and lithography arrangement including linear motor

KOCHERSPERGER PETER C0 citations33