Inventor
NOBE SHIGERU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “NOBE SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI CHEMICAL CO LTD
8 patentsUS10040971B2Aug 7, 2018
Polishing agent and method for polishing substrate using the polishing agent
HITACHI CHEMICAL CO LTD1 citations62
US7687590B2Mar 30, 2010
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts
HITACHI CHEMICAL CO LTD2 citations61
US7682701B2Mar 23, 2010
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts
HITACHI CHEMICAL CO LTD4 citations61
US7358300B2Apr 15, 2008
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts
HITACHI CHEMICAL CO LTD5 citations61
US9165777B2Oct 20, 2015
Polishing agent and method for polishing substrate using the polishing agent
HITACHI CHEMICAL CO LTD0 citations51
US8901002B2Dec 2, 2014
Polishing slurry for metal films and polishing method
HITACHI CHEMICAL CO LTD0 citations51
US9633848B2Apr 25, 2017
Photosensitive resin composition, method for producing patterned cured film, semiconductor element and electronic device
HITACHI CHEMICAL CO LTD1 citations48
US9395626B2Jul 19, 2016
Photosensitive resin composition, method for manufacturing patterned cured film, and electronic component
HITACHI CHEMICAL CO LTD0 citations48