Inventor
INAGAWA MAKOTO
US37 patents
⚠️ This page may combine multiple inventors who share the name “INAGAWA MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS6773562B1Aug 10, 2004
Shadow frame for substrate processing
APPLIED MATERIALS INC54 citations96
US6897411B2May 24, 2005
Heated substrate support
APPLIED MATERIALS INC19 citations92
US6516816B1Feb 11, 2003
Spin-rinse-dryer
APPLIED MATERIALS INC21 citations91
US6918864B1Jul 19, 2005
Roller that avoids substrate slippage
APPLIED MATERIALS INC19 citations90
US7440091B2Oct 21, 2008
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC16 citations89
US7815782B2Oct 19, 2010
PVD target
APPLIED MATERIALS INC17 citations84
US7432184B2Oct 7, 2008
Integrated PVD system using designated PVD chambers
APPLIED MATERIALS INC18 citations84
US7429718B2Sep 30, 2008
Heating and cooling of substrate support
APPLIED MATERIALS INC17 citations84
US6998579B2Feb 14, 2006
Chamber for uniform substrate heating
APPLIED MATERIALS INC14 citations84
USD622744SAug 31, 2010
Load lock roller ball support
APPLIED MATERIALS INC6 citations74
US7442900B2Oct 28, 2008
Chamber for uniform heating of large area substrates
APPLIED MATERIALS INC7 citations74
US10453718B2Oct 22, 2019
Slit valve door with moving mating part
APPLIED MATERIALS INC1 citations63
US7879210B2Feb 1, 2011
Partially suspended rolling magnetron
APPLIED MATERIALS INC2 citations63
US7652227B2Jan 26, 2010
Heating and cooling plate for a vacuum chamber
APPLIED MATERIALS INC6 citations63
US7834994B2Nov 16, 2010
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC2 citations60
US8915389B2Dec 23, 2014
Electron beam welding of large vacuum chamber body having a high emissivity coating
APPLIED MATERIALS INC0 citations52
US7226514B2Jun 5, 2007
Spin-rinse-dryer
APPLIED MATERIALS INC1 citations51
US10604846B2Mar 31, 2020
Thin film encapsulation mask preheat and substrate buffer chamber
APPLIED MATERIALS INC0 citations46
KURITA SHINICHI
5 patentsUS9922854B2Mar 20, 2018
Vertical inline CVD system
KURITA SHINICHI7 citations82
US10265868B2Apr 23, 2019
Transfer robot with substrate cooling
KURITA SHINICHI2 citations73
US9691650B2Jun 27, 2017
Substrate transfer robot with chamber and substrate monitoring capability
KURITA SHINICHI2 citations73
US8528762B2Sep 10, 2013
Electron beam welding of large vacuum chamber body having a high emissivity coating
KURITA SHINICHI1 citations52
US9324597B2Apr 26, 2016
Vertical inline CVD system
KURITA SHINICHI0 citations50
INAGAWA MAKOTO
4 patentsUSD670372SNov 6, 2012
Heater plate and heater element assembly
INAGAWA MAKOTO6 citations83
US8961756B2Feb 24, 2015
Ganged scanning of multiple magnetrons, especially two level folded magnetrons
INAGAWA MAKOTO2 citations62
USD687535SAug 6, 2013
Heater plate and heater element assembly
INAGAWA MAKOTO2 citations62
US8097133B2Jan 17, 2012
Evacuable magnetron chamber
INAGAWA MAKOTO5 citations62