Inventor
KEMEN THOMAS
DE27 patents
⚠️ This page may combine multiple inventors who share the name “KEMEN THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL MICROSCOPY GMBH
15 patentsUS10541112B2Jan 21, 2020
Charged particle beam system and method of operating the same
ZEISS CARL MICROSCOPY GMBH28 citations94
US10354831B2Jul 16, 2019
Charged particle inspection method and charged particle system
ZEISS CARL MICROSCOPY GMBH30 citations94
US10741355B1Aug 11, 2020
Multi-beam charged particle system
ZEISS CARL MICROSCOPY GMBH44 citations93
US10600613B2Mar 24, 2020
Particle beam system
ZEISS CARL MICROSCOPY GMBH33 citations93
US9349571B2May 24, 2016
Particle optical system
ZEISS CARL MICROSCOPY GMBH33 citations93
US9263233B2Feb 16, 2016
Charged particle multi-beam inspection system and method of operating the same
ZEISS CARL MICROSCOPY GMBH39 citations93
US9224576B2Dec 29, 2015
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH18 citations92
US9991089B2Jun 5, 2018
Particle beam system and method for operating a particle optical unit
ZEISS CARL MICROSCOPY GMBH34 citations91
US10504681B2Dec 10, 2019
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH3 citations84
US9673024B2Jun 6, 2017
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH9 citations84
US9324537B2Apr 26, 2016
Charged particle inspection method and charged particle system
ZEISS CARL MICROSCOPY GMBH8 citations84
US9552957B2Jan 24, 2017
Particle beam system
ZEISS CARL MICROSCOPY GMBH10 citations83
US9799485B2Oct 24, 2017
Particle beam system and method for operating a particle optical unit
ZEISS CARL MICROSCOPY GMBH8 citations80
US10121635B2Nov 6, 2018
Charged particle beam system and method of operating the same
ZEISS CARL MICROSCOPY GMBH3 citations73
US10147582B2Dec 4, 2018
Particle beam system
ZEISS CARL MICROSCOPY GMBH3 citations72
APPLIED MATERIALS ISRAEL LTD
2 patentsZEIDLER DIRK
2 patentsKNIPPELMEYER RAINER
2 patentsUS8097847B2Jan 17, 2012
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
KNIPPELMEYER RAINER16 citations91
US8637834B2Jan 28, 2014
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
KNIPPELMEYER RAINER17 citations90
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH
2 patentsUS10784070B2Sep 22, 2020
Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2 citations70
US11495433B1Nov 8, 2022
Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH3 citations67