Inventor
SCHUBERT STEFAN
DE31 patents
⚠️ This page may combine multiple inventors who share the name “SCHUBERT STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CARL ZEISS MULTISEM GMBH
13 patentsUS11049686B2Jun 29, 2021
Particle beam system and method for the particle-optical examination of an object
CARL ZEISS MULTISEM GMBH17 citations94
US10811215B2Oct 20, 2020
Charged particle beam system
CARL ZEISS MULTISEM GMBH35 citations93
US11158482B2Oct 26, 2021
Multi-beam particle microscope
CARL ZEISS MULTISEM GMBH7 citations84
US11657999B2May 23, 2023
Particle beam system and method for the particle-optical examination of an object
CARL ZEISS MULTISEM GMBH1 citations73
US11562881B2Jan 24, 2023
Charged particle beam system
CARL ZEISS MULTISEM GMBH3 citations72
US11164715B2Nov 2, 2021
Charged particle beam system
CARL ZEISS MULTISEM GMBH4 citations72
US12119204B2Oct 15, 2024
Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
CARL ZEISS MULTISEM GMBH0 citations60
US12494343B2Dec 9, 2025
Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distance
CARL ZEISS MULTISEM GMBH0 citations51
US11645740B2May 9, 2023
Method for detector equalization during the imaging of objects with a multi-beam particle microscope
CARL ZEISS MULTISEM GMBH0 citations51
US12340973B2Jun 24, 2025
Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product
CARL ZEISS MULTISEM GMBH0 citations49
US12255040B2Mar 18, 2025
Multi-beam particle beam system and method for operating same
CARL ZEISS MULTISEM GMBH0 citations48
US12293896B2May 6, 2025
Particle beam system
CARL ZEISS MULTISEM GMBH0 citations47
US12431324B2Sep 30, 2025
Multi-beam digital scan and image acquisition
CARL ZEISS MULTISEM GMBH0 citations44
ZEISS CARL MICROSCOPY GMBH
10 patentsUS10535494B2Jan 14, 2020
Particle beam system and method for the particle-optical examination of an object
ZEISS CARL MICROSCOPY GMBH39 citations98
US10622184B2Apr 14, 2020
Objective lens arrangement usable in particle-optical systems
ZEISS CARL MICROSCOPY GMBH29 citations94
US10541112B2Jan 21, 2020
Charged particle beam system and method of operating the same
ZEISS CARL MICROSCOPY GMBH28 citations94
US10354831B2Jul 16, 2019
Charged particle inspection method and charged particle system
ZEISS CARL MICROSCOPY GMBH30 citations94
US9263233B2Feb 16, 2016
Charged particle multi-beam inspection system and method of operating the same
ZEISS CARL MICROSCOPY GMBH39 citations93
US10163603B2Dec 25, 2018
Particle beam system and method for the particle-optical examination of an object
ZEISS CARL MICROSCOPY GMBH12 citations84
US9324537B2Apr 26, 2016
Charged particle inspection method and charged particle system
ZEISS CARL MICROSCOPY GMBH8 citations84
US10121635B2Nov 6, 2018
Charged particle beam system and method of operating the same
ZEISS CARL MICROSCOPY GMBH3 citations73
US11527379B2Dec 13, 2022
Objective lens arrangement usable in particle-optical systems
ZEISS CARL MICROSCOPY GMBH0 citations62
US9653255B2May 16, 2017
Scanning particle microscope having an energy selective detector system
ZEISS CARL MICROSCOPY GMBH1 citations52