Inventor
PENG HE HUI
TW14 patents
⚠️ This page may combine multiple inventors who share the name “PENG HE HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS9630295B2Apr 25, 2017
Mechanisms for removing debris from polishing pad
TAIWAN SEMICONDUCTOR MFG CO LTD25 citations93
US10875148B2Dec 29, 2020
Apparatus and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11996283B2May 28, 2024
Method for metal gate surface clean
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11410846B2Aug 9, 2022
Method for metal gate surface clean
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11999027B2Jun 4, 2024
Method for polishing semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11772227B2Oct 3, 2023
Device and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11602821B2Mar 14, 2023
Wafer polishing head, system thereof, and method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10847359B2Nov 24, 2020
Method for metal gate surface clean
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9723915B2Aug 8, 2017
Brush cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9633832B2Apr 25, 2017
Method for metal gate surface clean
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10875143B2Dec 29, 2020
Apparatus and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40