Inventor
SAWAYAMA TADASHI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “SAWAYAMA TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
15 patentsUS6313430B1Nov 6, 2001
Plasma processing apparatus and plasma processing method
CANON KK26 citations92
US6287943B1Sep 11, 2001
Deposition of semiconductor layer by plasma process
CANON KK28 citations92
US6271055B1Aug 7, 2001
Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers
CANON KK28 citations92
US6162988ADec 19, 2000
Photovoltaic element
CANON KK18 citations92
US6495392B2Dec 17, 2002
Process for producing a semiconductor device
CANON KK17 citations84
US9054243B2Jun 9, 2015
Solid-state image sensor and imaging system
CANON KK9 citations83
US6472296B2Oct 29, 2002
Fabrication of photovoltaic cell by plasma process
CANON KK7 citations74
US6368944B1Apr 9, 2002
Method of manufacturing photovoltaic element and apparatus therefor
CANON KK6 citations74
US6737123B2May 18, 2004
Silicon-based film formation process, silicon-based film, semiconductor device, and silicon-based film formation system
CANON KK12 citations73
US9391227B2Jul 12, 2016
Manufacturing method of semiconductor device
CANON KK4 citations71
US6436797B1Aug 20, 2002
Apparatus and method for forming a deposited film on a substrate
CANON KK7 citations71
US7638352B2Dec 29, 2009
Method of manufacturing photoelectric conversion device
CANON KK4 citations63
US7534628B2May 19, 2009
Method for forming semiconductor device and method for forming photovoltaic device
CANON KK5 citations62
US9140603B2Sep 22, 2015
Photoelectric conversion element, and photoelectric conversion apparatus and image sensing system
CANON KK1 citations52
US8852987B2Oct 7, 2014
Method of manufacturing image pickup device
CANON KK0 citations40
SAWAYAMA TADASHI
4 patentsUS9224777B2Dec 29, 2015
Solid-state image pickup device and method for manufacturing solid-state image pickup device
SAWAYAMA TADASHI4 citations71
US8723285B2May 13, 2014
Photoelectric conversion device manufacturing method thereof, and camera
SAWAYAMA TADASHI2 citations61
US8525907B2Sep 3, 2013
Solid-state image sensor and imaging system
SAWAYAMA TADASHI2 citations60
US8946843B2Feb 3, 2015
Solid-state image sensing device
SAWAYAMA TADASHI0 citations40