Inventor
KIKUCHI MASASHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KIKUCHI MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS10718053B2Jul 21, 2020
Wafer loading apparatus and film forming apparatus
SAMSUNG ELECTRONICS CO LTD2 citations69
US11728198B2Aug 15, 2023
Electrostatic chuck and wafer etching device including the same
SAMSUNG ELECTRONICS CO LTD1 citations62
US11309203B2Apr 19, 2022
Wafer stage and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations55