Inventor
REUTER PAUL B
US46 patents
⚠️ This page may combine multiple inventors who share the name “REUTER PAUL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
44 patentsUS9355876B2May 31, 2016
Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations
APPLIED MATERIALS INC452 citations95
US11581203B2Feb 14, 2023
Systems for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC7 citations85
US11244844B2Feb 8, 2022
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
APPLIED MATERIALS INC11 citations85
US10446428B2Oct 15, 2019
Load port operation in electronic device manufacturing apparatus, systems, and methods
APPLIED MATERIALS INC11 citations84
US11189511B2Nov 30, 2021
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC7 citations83
US10204805B2Feb 12, 2019
Thin heated substrate support
APPLIED MATERIALS INC10 citations83
US10262884B2Apr 16, 2019
Systems, apparatus, and methods for an improved load port
APPLIED MATERIALS INC8 citations82
US11508593B2Nov 22, 2022
Side storage pods, electronic device processing systems, and methods for operating the same
APPLIED MATERIALS INC2 citations73
US11081379B2Aug 3, 2021
Load port operation in electronic device manufacturing apparatus, systems, and methods
APPLIED MATERIALS INC1 citations73
US10566205B2Feb 18, 2020
Abatement and strip process chamber in a load lock configuration
APPLIED MATERIALS INC4 citations73
US10278501B2May 7, 2019
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods
APPLIED MATERIALS INC2 citations73
US10832928B2Nov 10, 2020
Systems, apparatus, and methods for an improved load port
APPLIED MATERIALS INC1 citations71
US10453726B2Oct 22, 2019
Electronic device manufacturing load port apparatus, systems, and methods
APPLIED MATERIALS INC2 citations71
US11353381B1Jun 7, 2022
Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
APPLIED MATERIALS INC3 citations70
US11373891B2Jun 28, 2022
Front-ducted equipment front end modules, side storage pods, and methods of operating the same
APPLIED MATERIALS INC2 citations68
US12159796B2Dec 3, 2024
Systems and methods for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC0 citations62
US12094715B2Sep 17, 2024
Abatement and strip process chamber in a load lock configuration
APPLIED MATERIALS INC0 citations62
US11791185B2Oct 17, 2023
Side storage pods, electronic device processing systems, and methods for operating the same
APPLIED MATERIALS INC1 citations62
US11749537B2Sep 5, 2023
Side storage pods, equipment front end modules, and methods for operating equipment front end modules
APPLIED MATERIALS INC0 citations62
US11637029B2Apr 25, 2023
Load port operation in electronic device manufacturing apparatus, systems, and methods
APPLIED MATERIALS INC0 citations62
US11574831B2Feb 7, 2023
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations62
US11177136B2Nov 16, 2021
Abatement and strip process chamber in a dual loadlock configuration
APPLIED MATERIALS INC0 citations62
US11171008B2Nov 9, 2021
Abatement and strip process chamber in a dual load lock configuration
APPLIED MATERIALS INC1 citations62
US10943788B2Mar 9, 2021
Abatement and strip process chamber in a load lock configuration
APPLIED MATERIALS INC0 citations62
US10758045B2Sep 1, 2020
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
APPLIED MATERIALS INC1 citations62
US10276354B2Apr 30, 2019
Segmented focus ring assembly
APPLIED MATERIALS INC1 citations62
US11842913B2Dec 12, 2023
Seal mechanisms for load ports
APPLIED MATERIALS INC0 citations61
US11640915B2May 2, 2023
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC0 citations61
US11404297B2Aug 2, 2022
Systems, apparatus, and methods for an improved load port
APPLIED MATERIALS INC0 citations61
US11276594B2Mar 15, 2022
Systems, apparatus, and methods for an improved load port backplane
APPLIED MATERIALS INC0 citations61
US10541165B2Jan 21, 2020
Systems, apparatus, and methods for an improved load port backplane
APPLIED MATERIALS INC1 citations61
US11171029B2Nov 9, 2021
Electronic device manufacturing load port apparatus, systems, and methods
APPLIED MATERIALS INC0 citations60
US12142508B2Nov 12, 2024
Factory interface robots usable with integrated load locks
APPLIED MATERIALS INC0 citations59
US12074045B2Aug 27, 2024
Prevention of contamination of substrates during gas purging
APPLIED MATERIALS INC1 citations59
US11810805B2Nov 7, 2023
Prevention of contamination of substrates during gas purging
APPLIED MATERIALS INC0 citations59
US12076854B2Sep 3, 2024
Increased number of load ports on factory interface with robot that moves on track
APPLIED MATERIALS INC0 citations55
US10468282B2Nov 5, 2019
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations51
US12589345B2Mar 31, 2026
Filter isolation for reduced startup time in low relative humidity equipment front end module
APPLIED MATERIALS INC0 citations50
US12159802B2Dec 3, 2024
Shortened load port for factory interface
APPLIED MATERIALS INC0 citations47
US12140339B2Nov 12, 2024
Filter isolation for equipment front end module
APPLIED MATERIALS INC0 citations47
US10381247B2Aug 13, 2019
Gas systems and methods for chamber ports
APPLIED MATERIALS INC0 citations47
US9435025B2Sep 6, 2016
Gas apparatus, systems, and methods for chamber ports
APPLIED MATERIALS INC1 citations47
US11061417B2Jul 13, 2021
Selectable-rate bottom purge apparatus and methods
APPLIED MATERIALS INC0 citations40
US9524889B2Dec 20, 2016
Processing systems and apparatus adapted to process substrates in electronic device manufacturing
APPLIED MATERIALS INC0 citations39