Inventor
ROCHA-ALVAREZ JUANCARLOS
US2 patents
Patents
2 patentsUS9355876B2May 31, 2016
Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations
APPLIED MATERIALS INC452 citations95
US9524889B2Dec 20, 2016
Processing systems and apparatus adapted to process substrates in electronic device manufacturing
APPLIED MATERIALS INC0 citations39