Inventor
DHAS ARUL N
US6 patents
⚠️ This page may combine multiple inventors who share the name “DHAS ARUL N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS7704894B1Apr 27, 2010
Method of eliminating small bin defects in high throughput TEOS films
NOVELLUS SYSTEMS INC50 citations96
US8017527B1Sep 13, 2011
Method and apparatus to reduce defects in liquid based PECVD films
NOVELLUS SYSTEMS INC50 citations90
US8034725B1Oct 11, 2011
Method of eliminating small bin defects in high throughput TEOS films
NOVELLUS SYSTEMS INC5 citations61
LAM RES CORP
3 patentsUS9328416B2May 3, 2016
Method for the reduction of defectivity in vapor deposited films
LAM RES CORP17 citations82
US9570289B2Feb 14, 2017
Method and apparatus to minimize seam effect during TEOS oxide film deposition
LAM RES CORP2 citations70
US12014921B2Jun 18, 2024
Plasma enhanced wafer soak for thin film deposition
LAM RES CORP0 citations57