Inventor
GARREIS REINER
DE5 patents
⚠️ This page may combine multiple inventors who share the name “GARREIS REINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
4 patentsUS7209292B2Apr 24, 2007
Projection objective, especially for microlithography, and method for adjusting a projection objective
ZEISS CARL SMT AG56 citations95
US6806942B2Oct 19, 2004
Projection exposure system
ZEISS CARL SMT AG32 citations92
US7310187B2Dec 18, 2007
Projection objective, especially for microlithography, and method for adjusting a projection objective
ZEISS CARL SMT AG8 citations73
US7079331B2Jul 18, 2006
Device for holding a beam splitter element
ZEISS CARL SMT AG7 citations71