Inventor
SHIGETOMI Toshiyuki
JP17 patents
Patents
17 patentsUS11084837B2Aug 10, 2021
Chemical deposition raw material including iridium complex and chemical deposition method using the chemical deposition raw material
TANAKA PRECIOUS METAL IND0 citations61
US11434563B2Sep 6, 2022
Raw material for chemical deposition containing ruthenium complex, and chemical deposition method using the raw material for chemical deposition
TANAKA PRECIOUS METAL IND0 citations59
US11149045B2Oct 19, 2021
Raw material for vapor deposition including organoplatinum compound and vapor deposition method using the raw material for vapor deposition
TANAKA PRECIOUS METAL IND0 citations59
US10407450B2Sep 10, 2019
Heterogeneous polynuclear complex for use in the chemical deposition of composite metal or metal compound thin films
TANAKA PRECIOUS METAL IND1 citations59
US9266916B2Feb 23, 2016
Production method for dodecacarbonyl triruthenium
TANAKA PRECIOUS METAL IND1 citations51
US10533027B2Jan 14, 2020
Method for producing cyclometalated iridium complex
TANAKA PRECIOUS METAL IND0 citations50
US9382616B2Jul 5, 2016
Chemical vapor deposition raw material comprising organoplatinum compound, and chemical vapor deposition method using the chemical vapor deposition raw material
TANAKA PRECIOUS METAL IND0 citations50
US10465283B2Nov 5, 2019
Organoplatinum compound for use in the chemical deposition of platinum compound thin films
TANAKA PRECIOUS METAL IND0 citations49
US10077282B2Sep 18, 2018
Raw material for chemical deposition composed of organoplatinum compound, and chemical deposition method using the raw material for chemical deposition
TANAKA PRECIOUS METAL IND0 citations48
US12152300B2Nov 26, 2024
Chemical vapor deposition method using an organomanganese compound as a starting material
TANAKA PRECIOUS METAL IND0 citations44
US9284249B2Mar 15, 2016
Method for extracting asymmetric β-diketone compound from β-diketone compound
TANAKA PRECIOUS METAL IND0 citations41
US10125158B2Nov 13, 2018
Method for manufacturing iridium complex
TANAKA PRECIOUS METAL IND0 citations40
US10053479B2Aug 21, 2018
Raw material and production method for cyclometalated iridium complex
TANAKA PRECIOUS METAL IND0 citations40
US9108997B2Aug 18, 2015
Method for recycling organic ruthenium compound for chemical vapor deposition
TANAKA PRECIOUS METAL IND0 citations40
US10131987B2Nov 20, 2018
Raw material for chemical deposition including organoruthenium compound, and chemical deposition method using the raw material for chemical deposition
TANAKA PRECIOUS METAL IND0 citations39
US10526698B2Jan 7, 2020
Chemical deposition raw material including heterogeneous polynuclear complex and chemical deposition method using the chemical deposition raw material
TANAKA PRECIOUS METAL IND0 citations38
US10815260B2Oct 27, 2020
Chemical vapor deposition raw material including dinuclear ruthenium complex and chemical deposition method using chemical vapor deposition raw material
TANAKA PRECIOUS METAL IND0 citations35