Inventor

NABEYA SHUNICHI

JP11 patents

⚠️ This page may combine multiple inventors who share the name “NABEYA SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TANAKA PRECIOUS METAL IND

9 patents

US9447495B2Sep 20, 2016

Chemical vapor deposition raw material containing organic nickel compound, and chemical vapor deposition method using the chemical vapor deposition raw material

TANAKA PRECIOUS METAL IND2 citations61

US10407450B2Sep 10, 2019

Heterogeneous polynuclear complex for use in the chemical deposition of composite metal or metal compound thin films

TANAKA PRECIOUS METAL IND1 citations59

US9382616B2Jul 5, 2016

Chemical vapor deposition raw material comprising organoplatinum compound, and chemical vapor deposition method using the chemical vapor deposition raw material

TANAKA PRECIOUS METAL IND0 citations50

US10465283B2Nov 5, 2019

Organoplatinum compound for use in the chemical deposition of platinum compound thin films

TANAKA PRECIOUS METAL IND0 citations49

US10077282B2Sep 18, 2018

Raw material for chemical deposition composed of organoplatinum compound, and chemical deposition method using the raw material for chemical deposition

TANAKA PRECIOUS METAL IND0 citations48

US9108997B2Aug 18, 2015

Method for recycling organic ruthenium compound for chemical vapor deposition

TANAKA PRECIOUS METAL IND0 citations40

US10131987B2Nov 20, 2018

Raw material for chemical deposition including organoruthenium compound, and chemical deposition method using the raw material for chemical deposition

TANAKA PRECIOUS METAL IND0 citations39

US10526698B2Jan 7, 2020

Chemical deposition raw material including heterogeneous polynuclear complex and chemical deposition method using the chemical deposition raw material

TANAKA PRECIOUS METAL IND0 citations38

US9805936B2Oct 31, 2017

Method for producing nickel thin film on a Si substrate by chemical vapor deposition method, and method for producing Ni silicide thin film on Si substrate

TANAKA PRECIOUS METAL IND0 citations36

SAITO MASAYUKI

1 patent

US8642796B2Feb 4, 2014

Organoruthenium compound for chemical deposition and chemical deposition process using the organoruthenium compound

SAITO MASAYUKI3 citations61

SUZUKI KAZUHARU

1 patent

US8911827B2Dec 16, 2014

Chemical vapor deposition method using an organoplatinum compound

SUZUKI KAZUHARU2 citations58