Inventor
NAGATA TOMOYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAGATA TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUSD800080SOct 17, 2017
Reactor tube for semiconductor production devices
TOKYO ELECTRON LTD14 citations82
US10934618B2Mar 2, 2021
Substrate processing apparatus, substrate loading method, and substrate processing method
TOKYO ELECTRON LTD2 citations71
US10014199B2Jul 3, 2018
Wafer boat support table and heat treatment apparatus using the same
TOKYO ELECTRON LTD2 citations71
US9293323B2Mar 22, 2016
Method of forming silicon film
TOKYO ELECTRON LTD3 citations71
US10636627B2Apr 28, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations61
US12438055B2Oct 7, 2025
Abnormality detection method and processing apparatus
TOKYO ELECTRON LTD0 citations58
US11846023B2Dec 19, 2023
Injector and substrate processing apparatus using the same, and substrate processing method
TOKYO ELECTRON LTD0 citations50
US9263256B2Feb 16, 2016
Method of forming seed layer, method of forming silicon film, and film forming apparatus
TOKYO ELECTRON LTD0 citations40
MITSUBISHI ELECTRIC CORP
3 patentsUS10359757B2Jul 23, 2019
Control logic diagram analysis device and control logic diagram analysis method
MITSUBISHI ELECTRIC CORP1 citations61
US11361125B2Jun 14, 2022
Support method, design support apparatus, and a non-transitory recording medium storing a design support program
MITSUBISHI ELECTRIC CORP0 citations50
US10347024B2Jul 9, 2019
Control logic diagram creation support apparatus
MITSUBISHI ELECTRIC CORP0 citations40