P

Inventor

BRIEN DANIEL

DE6 patents
⚠️ This page may combine multiple inventors who share the name “BRIEN DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES AG

3 patents
US10658204B2May 19, 2020

Spin chuck with concentrated center and radial heating

LAM RES AG7 citations79
US10312117B2Jun 4, 2019

Apparatus and radiant heating plate for processing wafer-shaped articles

LAM RES AG3 citations71
US12217980B2Feb 4, 2025

Apparatus for processing a wafer, and method of controlling such an apparatus

LAM RES AG0 citations38

AIXTRON SE

2 patents
US10438823B2Oct 8, 2019

Substrate treatment device

AIXTRON SE1 citations57
US11053586B2Jul 6, 2021

Coated flat component in a CVD reactor

AIXTRON SE0 citations46

BRIEN DANIEL

1 patent
US8841221B2Sep 23, 2014

MOCVD reactor having cylindrical gas inlet element

BRIEN DANIEL1 citations39