Inventor
CHUNG SUKJIN
KR7 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG SUKJIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS10822694B2Nov 3, 2020
Substrate processing apparatus and method of cleaning the same
SAMSUNG ELECTRONICS CO LTD3 citations70
US9951422B2Apr 24, 2018
Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors
SAMSUNG ELECTRONICS CO LTD2 citations64
US11854864B2Dec 26, 2023
Semiconductor device including trench isolation layer and method of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations55
US11211284B2Dec 28, 2021
Semiconductor device including trench isolation layer and method of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations55
US10607832B2Mar 31, 2020
Method and apparatus for forming a thin layer
SAMSUNG ELECTRONICS CO LTD0 citations35
US10844491B2Nov 24, 2020
Gas supply unit and substrate processing system
SAMSUNG ELECTRONICS CO LTD0 citations33