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Inventor
LEE JONGCHEOL
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “LEE JONGCHEOL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patents
US9951422B2
Apr 24, 2018
Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors
SAMSUNG ELECTRONICS CO LTD
2 citations
64
US10844491B2
Nov 24, 2020
Gas supply unit and substrate processing system
SAMSUNG ELECTRONICS CO LTD
0 citations
33
CHUNG SUKJIN
1 patent
US9082611B2
Jul 14, 2015
Methods of forming a layer
CHUNG SUKJIN
4 citations
62