Inventor

SHIN JAECHUL

KR2 patents

Patents

2 patents

US9951422B2Apr 24, 2018

Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors

SAMSUNG ELECTRONICS CO LTD2 citations64

US10844491B2Nov 24, 2020

Gas supply unit and substrate processing system

SAMSUNG ELECTRONICS CO LTD0 citations33