Inventor
ISHII YU
JP32 patents
⚠️ This page may combine multiple inventors who share the name “ISHII YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
31 patentsUSD777546SJan 31, 2017
Work holder for polishing apparatus
EBARA CORP407 citations97
US6609950B2Aug 26, 2003
Method for polishing a substrate
EBARA CORP20 citations93
US7837534B2Nov 23, 2010
Apparatus for heating or cooling a polishing surface of a polishing apparatus
EBARA CORP26 citations92
US6544111B1Apr 8, 2003
Polishing apparatus and polishing table therefor
EBARA CORP41 citations92
US10328465B2Jun 25, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP6 citations84
US9566616B2Feb 14, 2017
Substrate processing apparatus
EBARA CORP5 citations84
US8360817B2Jan 29, 2013
Polishing apparatus and polishing method
EBARA CORP7 citations80
US7291057B2Nov 6, 2007
Apparatus for polishing a substrate
EBARA CORP7 citations74
US11511389B2Nov 29, 2022
Polishing head and polishing apparatus
EBARA CORP3 citations73
US9808903B2Nov 7, 2017
Method of polishing back surface of substrate and substrate processing apparatus
EBARA CORP3 citations73
US9393595B2Jul 19, 2016
Abrasive film fabrication method and abrasive film
EBARA CORP3 citations73
US9492910B2Nov 15, 2016
Polishing method
EBARA CORP5 citations72
USD845568SApr 9, 2019
Pad holder for polishing apparatus
EBARA CORP4 citations71
US10458020B2Oct 29, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP3 citations70
US6186872B1Feb 13, 2001
Polisher
EBARA CORP6 citations63
US12036634B2Jul 16, 2024
Substrate processing control system, substrate processing control method, and program
EBARA CORP1 citations62
US11192147B2Dec 7, 2021
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations62
US11139160B2Oct 5, 2021
Apparatus and method for processing a surface of a substrate
EBARA CORP1 citations62
US10926376B2Feb 23, 2021
Method and apparatus for polishing a substrate, and method for processing a substrate
EBARA CORP0 citations62
US11446784B2Sep 20, 2022
Chemical mechanical polishing apparatus for polishing workpiece
EBARA CORP0 citations59
US11180853B2Nov 23, 2021
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations59
US11618123B2Apr 4, 2023
Polishing method and polishing apparatus
EBARA CORP0 citations52
US10854473B2Dec 1, 2020
Polishing method, polishing apparatus, and substrate processing system
EBARA CORP0 citations52
US10799917B2Oct 13, 2020
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations52
US10376929B2Aug 13, 2019
Apparatus and method for polishing a surface of a substrate
EBARA CORP0 citations52
US10016875B2Jul 10, 2018
Abrasive film fabrication method and abrasive film
EBARA CORP0 citations52
US9808836B2Nov 7, 2017
Substrate processing apparatus
EBARA CORP0 citations52
US11436392B2Sep 6, 2022
Substrate processing apparatus and storage medium having program stored therein
EBARA CORP0 citations51
US11701750B2Jul 18, 2023
Top ring for holding a substrate and substrate processing apparatus
EBARA CORP0 citations44
US10651057B2May 12, 2020
Apparatus and method for cleaning a back surface of a substrate
EBARA CORP0 citations41
US9821429B2Nov 21, 2017
Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus
EBARA CORP0 citations39