Inventor
SEGERS BART PETER BERT
BE12 patents
⚠️ This page may combine multiple inventors who share the name “SEGERS BART PETER BERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS11067902B2Jul 20, 2021
Computational metrology
ASML NETHERLANDS BV9 citations85
US10990018B2Apr 27, 2021
Computational metrology
ASML NETHERLANDS BV10 citations83
US11347150B2May 31, 2022
Computational metrology
ASML NETHERLANDS BV2 citations70
US10649342B2May 12, 2020
Method and apparatus for determining a fingerprint of a performance parameter
ASML NETHERLANDS BV2 citations69
US10571812B2Feb 25, 2020
Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations66
US12461451B2Nov 4, 2025
Computational metrology
ASML NETHERLANDS BV0 citations62
US12189302B2Jan 7, 2025
Computational metrology
ASML NETHERLANDS BV0 citations60
US11194258B2Dec 7, 2021
Method and apparatus for determining a fingerprint of a performance parameter
ASML NETHERLANDS BV0 citations59
US11385554B2Jul 12, 2022
Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate
ASML NETHERLANDS BV0 citations58
US9519224B2Dec 13, 2016
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations56
US10895811B2Jan 19, 2021
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations45