Inventor
SCHMITT-WEAVER EMIL PETER
NL18 patents
⚠️ This page may combine multiple inventors who share the name “SCHMITT-WEAVER EMIL PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
17 patentsUS10990018B2Apr 27, 2021
Computational metrology
ASML NETHERLANDS BV10 citations83
US11422476B2Aug 23, 2022
Methods and apparatus for monitoring a lithographic manufacturing process
ASML NETHERLANDS BV2 citations73
US11774862B2Oct 3, 2023
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV4 citations72
US9971251B2May 15, 2018
Lithography system and a machine learning controller for such a lithography system
ASML NETHERLANDS BV2 citations71
US9715181B2Jul 25, 2017
Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV3 citations71
US11347150B2May 31, 2022
Computational metrology
ASML NETHERLANDS BV2 citations70
US11175591B2Nov 16, 2021
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV2 citations70
US11249404B2Feb 15, 2022
System and method for measurement of alignment
ASML NETHERLANDS BV2 citations68
US11022896B2Jun 1, 2021
Mark position determination method
ASML NETHERLANDS BV3 citations68
US10627729B2Apr 21, 2020
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV4 citations68
US12189302B2Jan 7, 2025
Computational metrology
ASML NETHERLANDS BV0 citations60
US10684557B2Jun 16, 2020
Method for adjusting actuation of a lithographic apparatus
ASML NETHERLANDS BV1 citations60
US9507279B2Nov 29, 2016
Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV2 citations59
US10884345B2Jan 5, 2021
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV0 citations57
US12032297B2Jul 9, 2024
Method for monitoring lithographic apparatus
ASML NETHERLANDS BV0 citations55
US10866527B2Dec 15, 2020
Methods and apparatus for monitoring a lithographic manufacturing process
ASML NETHERLANDS BV0 citations52
US10078273B2Sep 18, 2018
Lithographic apparatus with data processing apparatus
ASML NETHERLANDS BV0 citations38