Inventor

VAN RHEE PETRUS GERARDUS

NL3 patents

Patents

3 patents

US10990018B2Apr 27, 2021

Computational metrology

ASML NETHERLANDS BV10 citations83

US11347150B2May 31, 2022

Computational metrology

ASML NETHERLANDS BV2 citations70

US12189302B2Jan 7, 2025

Computational metrology

ASML NETHERLANDS BV0 citations60