Inventor
YU HYUNWOO
KR6 patents
Patents
6 patentsUS10990018B2Apr 27, 2021
Computational metrology
ASML NETHERLANDS BV10 citations83
US11347150B2May 31, 2022
Computational metrology
ASML NETHERLANDS BV2 citations70
US12189302B2Jan 7, 2025
Computational metrology
ASML NETHERLANDS BV0 citations60
US12044981B2Jul 23, 2024
Method and apparatus for optimization of lithographic process
ASML NETHERLANDS BV1 citations60
US11099487B2Aug 24, 2021
Method and apparatus for optimization of lithographic process
ASML NETHERLANDS BV0 citations60
US12578653B2Mar 17, 2026
Method for determining a sampling scheme, a semiconductor substrate measurement apparatus, a lithographic apparatus
ASML NETHERLANDS BV0 citations45