Inventor
SHANKARAMURTHY VENKATANARAYANA
US11 patents
Patents
11 patentsUS11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US12568791B2Mar 3, 2026
Controlling concentration profiles for deposited films using machine learning
APPLIED MATERIALS INC0 citations60
US12062567B2Aug 13, 2024
Systems and methods for substrate support temperature control
APPLIED MATERIALS INC1 citations59
US11841692B2Dec 12, 2023
Variable loop control feature
APPLIED MATERIALS INC1 citations58
US11449026B2Sep 20, 2022
Variable loop control feature
APPLIED MATERIALS INC0 citations58
US12566412B2Mar 3, 2026
Deposition thickness drift compensation in substrate processing systems
APPLIED MATERIALS INC0 citations54
US11714430B2Aug 1, 2023
Process fluid path switching in recipe operations
APPLIED MATERIALS INC0 citations53
US11487304B2Nov 1, 2022
Process fluid path switching in recipe operations
APPLIED MATERIALS INC0 citations53
US11532525B2Dec 20, 2022
Controlling concentration profiles for deposited films using machine learning
APPLIED MATERIALS INC0 citations50