Inventor
BERENS BRETT
US5 patents
Patents
5 patentsUS11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US11841692B2Dec 12, 2023
Variable loop control feature
APPLIED MATERIALS INC1 citations58
US11449026B2Sep 20, 2022
Variable loop control feature
APPLIED MATERIALS INC0 citations58