Inventor
NISHIDA MASAYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NISHIDA MASAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
5 patentsUS11728159B2Aug 15, 2023
Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11257669B2Feb 22, 2022
Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11535931B2Dec 27, 2022
Method of manufacturing semiconductor device, method of managing parts, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11035721B2Jun 15, 2021
Substrate processing apparatus, vibration detection system and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations49
US12461507B2Nov 4, 2025
Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program
KOKUSAI ELECTRIC CORP0 citations48