Inventor
KITAGAWA NAOKO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KITAGAWA NAOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
3 patentsUS11728159B2Aug 15, 2023
Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11257669B2Feb 22, 2022
Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11515152B2Nov 29, 2022
Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate
KOKUSAI ELECTRIC CORP0 citations49