Inventor
OTANI SHOGO
JP5 patents
Patents
5 patentsUS12406843B2Sep 2, 2025
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US11823886B2Nov 21, 2023
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US11728159B2Aug 15, 2023
Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11257669B2Feb 22, 2022
Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations59
US11515152B2Nov 29, 2022
Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate
KOKUSAI ELECTRIC CORP0 citations49