Inventor
KO EUN HYEA
KR4 patents
Patents
4 patentsUS12588478B2Mar 24, 2026
Method of fabricating semiconductor device including organic and silicon oxide layers
SAMSUNG ELECTRONICS CO LTD0 citations60
US11901191B2Feb 13, 2024
Atomic layer etching method and semiconductor device manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12500079B2Dec 16, 2025
Semiconductor device manufacturing method
SAMSUNG ELECTRONICS CO LTD0 citations49
US12557370B2Feb 17, 2026
Semiconductor device manufacturing method
SAMSUNG ELECTRONICS CO LTD0 citations48