Inventor
YANG BYEONG IL
KR15 patents
⚠️ This page may combine multiple inventors who share the name “YANG BYEONG IL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DNF CO LTD
13 patentsUS9245740B2Jan 26, 2016
Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same
DNF CO LTD18 citations83
US9809608B2Nov 7, 2017
Cyclodisilazane derivative, method for preparing the same and silicon-containing thin film using the same
DNF CO LTD4 citations72
US9586979B2Mar 7, 2017
Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same
DNF CO LTD3 citations72
US11390635B2Jul 19, 2022
Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same
DNF CO LTD3 citations70
US10202407B2Feb 12, 2019
Trisilyl amine derivative, method for preparing the same and silicon-containing thin film using the same
DNF CO LTD1 citations62
US12518963B2Jan 6, 2026
Composition for depositing silicon-containing thin film and method for manufacturing silicon-containing thin film using the same
DNF CO LTD0 citations61
US11749522B2Sep 5, 2023
Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin using the same
DNF CO LTD0 citations61
US11393676B2Jul 19, 2022
Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin film using the same
DNF CO LTD0 citations61
US11358974B2Jun 14, 2022
Silylamine compound, composition for depositing silicon-containing thin film containing the same, and method for manufacturing silicon-containing thin film using the composition
DNF CO LTD0 citations61
US11319333B2May 3, 2022
Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same
DNF CO LTD0 citations60
US10894799B2Jan 19, 2021
Composition for depositing silicon-containing thin film including disilylamine compound and method for manufacturing silicon-containing thin film using the same
DNF CO LTD1 citations60
US12398459B2Aug 26, 2025
Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufacturing method therefor
DNF CO LTD0 citations58
US9916974B2Mar 13, 2018
Amino-silyl amine compound and the manufacturing method of dielectric film containing Si—N bond by using atomic layer deposition
DNF CO LTD1 citations51