Inventor

SIMAKOV DMITRY

DE2 patents

Patents

2 patents

US12372431B2Jul 29, 2025

Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured

ZEISS CARL SMT GMBH0 citations46

US11899358B2Feb 13, 2024

Method for measuring photomasks

ZEISS CARL SMT GMBH0 citations45