Inventor
BUTTGEREIT UTE
DE7 patents
⚠️ This page may combine multiple inventors who share the name “BUTTGEREIT UTE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS10698318B2Jun 30, 2020
Method and device for characterizing a mask for microlithography
ZEISS CARL SMT GMBH1 citations59
US10788748B2Sep 29, 2020
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
ZEISS CARL SMT GMBH1 citations58
US10539865B2Jan 21, 2020
Method and device for determining an OPC model
ZEISS CARL SMT GMBH0 citations50
US11899358B2Feb 13, 2024
Method for measuring photomasks
ZEISS CARL SMT GMBH0 citations45
US9869640B2Jan 16, 2018
Method and device for examining a mask
ZEISS CARL SMT GMBH0 citations39
US10578975B2Mar 3, 2020
Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography
ZEISS CARL SMT GMBH0 citations37