Inventor
NAGARAJAN KUMARESAN
IN5 patents
Patents
5 patentsUS11469124B2Oct 11, 2022
Contactless latch and coupling for vacuum wafer transfer cassette
APPLIED MATERIALS INC0 citations59
US11914406B2Feb 27, 2024
Self-sensing and self-actuating valve for modulating process coolant flow
APPLIED MATERIALS INC0 citations52
US11609584B2Mar 21, 2023
Self-sensing and self-actuating valve for modulating process coolant flow
APPLIED MATERIALS INC0 citations52
US11913563B2Feb 27, 2024
Temperature actuated valve and methods of use thereof
APPLIED MATERIALS INC0 citations43
US12119198B2Oct 15, 2024
Movable bracket interlocking mating connectors with switch activation
APPLIED MATERIALS INC0 citations42