Inventor
FU JIYOU
US8 patents
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KLA TENCOR CORP
5 patentsUS10072921B2Sep 11, 2018
Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element
KLA TENCOR CORP17 citations93
US10101676B2Oct 16, 2018
Spectroscopic beam profile overlay metrology
KLA TENCOR CORP15 citations83
US9739719B2Aug 22, 2017
Measurement systems having linked field and pupil signal detection
KLA TENCOR CORP6 citations71
US10234271B2Mar 19, 2019
Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector
KLA TENCOR CORP0 citations51
US7903250B1Mar 8, 2011
Control by sample reflectivity
KLA TENCOR CORP0 citations45