Inventor
TAE PATRICK
US14 patents
⚠️ This page may combine multiple inventors who share the name “TAE PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS11708635B2Jul 25, 2023
Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
APPLIED MATERIALS INC4 citations72
US11781214B2Oct 10, 2023
Differential capacitive sensors for in-situ film thickness and dielectric constant measurement
APPLIED MATERIALS INC2 citations70
US11284018B1Mar 22, 2022
Smart camera substrate
APPLIED MATERIALS INC2 citations69
US12000041B2Jun 4, 2024
Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
APPLIED MATERIALS INC0 citations60
US12442765B2Oct 14, 2025
Transmission corrected plasma emission using in-situ optical reflectometry
APPLIED MATERIALS INC0 citations59
US12432461B2Sep 30, 2025
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12123090B2Oct 22, 2024
Differential capacitive sensor for in-situ film thickness and dielectric constant measurement
APPLIED MATERIALS INC0 citations59
US12114083B2Oct 8, 2024
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12031910B2Jul 9, 2024
Transmission corrected plasma emission using in-situ optical reflectometry
APPLIED MATERIALS INC0 citations59
US11736818B2Aug 22, 2023
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12469686B2Nov 11, 2025
Process characterization and correction using optical wall process sensor (OWPS)
APPLIED MATERIALS INC0 citations46
US12009191B2Jun 11, 2024
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall
APPLIED MATERIALS INC0 citations41