P

Inventor

TAE PATRICK

US14 patents
⚠️ This page may combine multiple inventors who share the name “TAE PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

12 patents
US11708635B2Jul 25, 2023

Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner

APPLIED MATERIALS INC4 citations72
US11781214B2Oct 10, 2023

Differential capacitive sensors for in-situ film thickness and dielectric constant measurement

APPLIED MATERIALS INC2 citations70
US11284018B1Mar 22, 2022

Smart camera substrate

APPLIED MATERIALS INC2 citations69
US12000041B2Jun 4, 2024

Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner

APPLIED MATERIALS INC0 citations60
US12442765B2Oct 14, 2025

Transmission corrected plasma emission using in-situ optical reflectometry

APPLIED MATERIALS INC0 citations59
US12432461B2Sep 30, 2025

Smart camera substrate

APPLIED MATERIALS INC0 citations59
US12123090B2Oct 22, 2024

Differential capacitive sensor for in-situ film thickness and dielectric constant measurement

APPLIED MATERIALS INC0 citations59
US12114083B2Oct 8, 2024

Smart camera substrate

APPLIED MATERIALS INC0 citations59
US12031910B2Jul 9, 2024

Transmission corrected plasma emission using in-situ optical reflectometry

APPLIED MATERIALS INC0 citations59
US11736818B2Aug 22, 2023

Smart camera substrate

APPLIED MATERIALS INC0 citations59
US12469686B2Nov 11, 2025

Process characterization and correction using optical wall process sensor (OWPS)

APPLIED MATERIALS INC0 citations46
US12009191B2Jun 11, 2024

Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall

APPLIED MATERIALS INC0 citations41

KLA CORP

2 patents