P

Inventor

SMITH IAN

US99 patents
⚠️ This page may combine multiple inventors who share the name “SMITH IAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

16 patents
US7317531B2Jan 8, 2008

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP83 citations98
US7242477B2Jul 10, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP124 citations98
US6710876B1Mar 23, 2004

Metrology system using optical phase

KLA TENCOR TECH CORP100 citations98
US7433040B2Oct 7, 2008

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP28 citations96
US7385699B2Jun 10, 2008

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP34 citations96
US7301634B2Nov 27, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP35 citations96
US7298481B2Nov 20, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP46 citations96
US7289213B2Oct 30, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP49 citations96
US7280212B2Oct 9, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP45 citations96
US7933016B2Apr 26, 2011

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP15 citations92
US7876440B2Jan 25, 2011

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP13 citations92
US7663753B2Feb 16, 2010

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP19 citations92
US7564557B2Jul 21, 2009

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP19 citations92
US7379183B2May 27, 2008

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP18 citations92
US7361941B1Apr 22, 2008

Calibration standards and methods

KLA TENCOR TECH CORP24 citations90
US7027146B1Apr 11, 2006

Methods for forming a calibration standard and calibration standards for inspection systems

KLA TENCOR TECH CORP33 citations89

SMITH IAN

3 patents

DURA PHARMA INC

3 patents

WYKO INC

3 patents

BRITISH GAS CORP

2 patents

NEX TEAM INC

2 patents

GN NETCOM AS

2 patents

AGILENT TECHNOLOGIES INC

2 patents

GOOGLE LLC

1 patent

HAUZER IND BV

1 patent

UNIV AKRON

1 patent

KLA TENCOR TECHNOLOGIES

1 patent

ALCOA INC

1 patent

PII LTD

1 patent

I AND L INVEST PTY LTD

1 patent

GRANT WILLIAM & SONS LTD

1 patent

DAVIAN ENTPR LLC

1 patent

WEATHERFORD TECH HOLDINGS LLC

1 patent

NOVELIS INC

1 patent

THORNEWELL PETER M

1 patent

JAGUAR LAND ROVER LTD

1 patent

UIPCO LLC

1 patent

ROGERS CORP

1 patent

ACCURIS TECHNOLOGIES LTD

1 patent

COGHLAN FINBARR

1 patent

Showing the top 50 of 99 patents by PatentIndex Score.