Inventor
SHARBONO CHARLES
US7 patents
Patents
7 patentsUS11686005B1Jun 27, 2023
Electroplating systems and methods with increased metal ion concentrations
APPLIED MATERIALS INC0 citations59
US11697887B2Jul 11, 2023
Multi-compartment electrochemical replenishment cell
APPLIED MATERIALS INC0 citations58
US12344955B2Jul 1, 2025
Electroplating co-planarity improvement by die shielding
APPLIED MATERIALS INC0 citations50
US10840104B2Nov 17, 2020
Controlled etch of nitride features
APPLIED MATERIALS INC0 citations49
US12146235B2Nov 19, 2024
Plating and deplating currents for material co-planarity in semiconductor plating processes
APPLIED MATERIALS INC0 citations45
US9922874B2Mar 20, 2018
Methods of enhancing polymer adhesion to copper
APPLIED MATERIALS INC0 citations39
US9758893B2Sep 12, 2017
Electroplating methods for semiconductor substrates
APPLIED MATERIALS INC0 citations30